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Tool-Integrated Reasoning (TIR) extends LLM capabilities by leveraging external environments. However, existing methods lack the deliberation during sequential tool invocation required for strategic planning and self-correction. While RL mitigates this, conventional approaches for Tool-Integrated Reasoning are hindered by sparse outcome-based rewards, failing to supervise intermediate reasoning steps and tool invocations. To address this, we propose DeepTool, a novel framework that scales deliberate thinking within the interleaved process of thinking, action, and observation at each turn. In DeepTool, we first introduce a synthesis pipeline that evolves extended thinking into interleaved trajectories, integrating adversarial perturbations to ensure robustness and self-correction. Secondly, we devise Process-Supervised Reinforcement Learning based on GRPO, which utilizes an Action-Centric Process Reward to reinforce intermediate interleaved thinking and enforce precise tool invocation at every turn. Extensive experiments demonstrate that DeepTool achieves superior performance, boosting Qwen2.5-7B significantly across six benchmarks (e.g., AIME24: 3.2% -> 40.4% and HMMT25: 0.0% -> 28.6%). Furthermore, the token cost-effectiveness analysis confirms the utility of interleaved thinking, demonstrating DeepTool's optimal balance between performance and token efficiency.