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We report a significant reduction of low-temperature damping losses in tensile-strained, ultrathin Y3Fe5O12 (YIG) films grown by pulsed laser deposition, exhibiting ultralow damping constants and tunable magnetic anisotropy. Comparative broadband FMR measurements show that tensile-strained YIG films on Gd3Sc2Ga3O12 (GSGG) retain low damping even at nanometer thicknesses and cryogenic temperatures (down to 2 K), outperforming relaxed films on Gd3Ga5O12. Based on static magnetometry measurements along with microstructural and compositional analyses, we attribute these enhanced dynamic properties to the suppression of interdiffusion across the YIG/GSGG interface, resulting from enhanced chemical stability and favorable growth kinetics by the presence of Sc. Our findings highlight the importance of chemical and kinetic factors in achieving few-nanometer-thick YIG film with negligible low-temperature damping dissipation and perpendicular magnetic anisotropy for cryogenic spintronic applications.